SENKO SI-310 built-in pyrolyzer for C4F6, C5F8, CH2F2, CH3F and similar semiconductor gases.
| Item | Nilai |
|---|---|
| Gas sasaran | C₄F₆ / C₅F₈ / CH₂F₂ / CH₃F via pyrolysis |
| Jenis sensor | Pyrolyzer + cartridge |
| Kaedah pengukuran | Sampling 100–1000 ml/min |
| Perlindungan | Ex enclosure |
| Perlindungan letupan | Explosion-proof |
| Suhu operasi | fab |
| Bateri | 24 VDC, ~15 W (pyrolyzer 600 mA) |
| Dimensi | 212 × 225 × 141.7 mm |
| Berat | 6.5 kg |
Cartridge sensor, flow display, 4–20 mA, 3 relays, RS-485/Ethernet/Bluetooth. ~6.5 kg.
| Model | SI-310 |
| Principle | Pyrolyzer + cartridge |
| Method | Sampling 100–1000 ml/min |
| IP | Ex enclosure |
| Certification | Ex d (catalog) |